Machined parts for vacuum and semiconductor equipment

Chambers, flanges and fixtures for process and inspection equipment. Lithography equipment is outside our scope. Tolerances and surface requirements are confirmed against your drawing before the order. Made in our audited network in Bursa.

Turned stainless steel shaft with collars, grooves, a keyway and a threaded end
IndustryVacuum & semiconductor equipment (non-litho)
Typical partsChambers, flanges, fixtures
Materials1.4301 / 1.4404, Al 6061
Key requirementsSealing faces, surface finish, documented material
Contactsales@ertas.engineering

Parts we quote for vacuum equipment builders

Typical parts and what the drawing usually asks for. Your drawing decides; this is where we usually start.

PartTypical materialProcessWhat the drawing usually asks for
Process and inspection chambers1.4301 / 1.4404, Al 6061CNC milling, welded assembliesSealing faces, roughness on vacuum-side faces, weld seams to the drawing
Flanges and blank flanges1.4301 / 1.4404CNC turning, CNC millingScratch-free sealing faces, flatness, bolt-circle position
Fixtures and carriersAl 6061, 1.4404CNC millingFlatness, hole positions, burr-free and clean
Ports, adapters and turned parts1.4404CNC turningSealing faces, thread quality, no trapped volumes where the drawing says so
Welded sub-assemblies1.4301 / 1.4404Welded assemblies, CNC millingWeld seams to the drawing, faces machined after welding, documented material (EN 10204 3.1)

Materials: stainless 1.4301/1.4404, EN AW-6061.

What we check before parts leave

The points vacuum drawings usually call out, checked against your drawing.

  1. Sealing facesSealing faces checked for scratches and for the roughness on the drawing, and reported when marked as critical.
  2. Flatness and positionFlatness of flange faces and the bolt-circle position measured against the drawing.
  3. Weld seamsWeld seams checked visually against the requirement on the drawing.
  4. Cleaning and packingCleaning and packing are agreed per drawing before the order, so the parts arrive the way your assembly needs them.
  5. Material on paperMaterial documented to EN 10204 3.1 and matched to the grade on your drawing.
  6. Critical dimensionsA measurement report for the features you mark, delivered with the parts.
Export controlSemiconductor manufacturing equipment, and items specially designed for it, can be dual-use controlled. We ask for your classification before quoting and do not ship controlled items without the required licences.

Guides

Short references we use ourselves when reviewing a drawing.

Other industries

Same network, same documents, different drawings.

Send the drawing

Attach the drawing, the quantity and your export classification. You get a route, a price and a lead time back.

SupplierErtaş Engineering
IndustryVacuum & semiconductor equipment (non-litho)
SendDrawing, quantity, export classification
Contactsales@ertas.engineering